Spec | Description |
---|---|
S1 | Next multi-sequence monitor |
S2 | Control status input |
S3 | Step trigger |
S4 | Emergency stop (E-STOP) |
S5 | Hold/resume |
S6 | Manual/auto permissive |
S7 | Auto trigger |
S8 | Insert trigger |
S9 | Resume phase number |
S10 | Insert step number |
S11 | Insert recipe number |
S12 | Spare |
S13 | Phase 1 step |
S14 | Phase 2 step |
S15 | Phase 3 step |
S16 | Phase 4 step |
S17 | Phase 5 step |
S18 | Phase 6 step |
S19 | Phase 7 step |
S20 | Phase 8 step |
S21 | Normal phase 1 |
S22 | Normal phase 2 |
S23 | Normal phase 3 |
S24 | Normal phase 4 |
S25 | Normal phase 5 |
S26 | Normal phase 6 |
S27 | Normal phase 7 |
S28 | Normal phase 8 |
S29 | Fault phase 1 |
S30 | Fault phase 2 |
S31 | Fault phase 3 |
S32 | Fault phase 4 |
S33 | Fault phase 5 |
S34 | Fault phase 6 |
S35 | Fault phase 7 |
S36 | Fault phase 8 |
S37 | Phase 1 recipe |
S38 | Phase 2 recipe |
S39 | Phase 3 recipe |
S40 | Phase 4 recipe |
S41 | Phase 5 recipe |
S42 | Phase 6 recipe |
S43 | Phase 7 recipe |
S44 | Phase 8 recipe |
Block | Type | Description |
---|---|---|
N | Real | Jump step number |
N+1 | Bit | Jump step trigger |
N+2 | Real | Recipe jump step |
N+3 | Real | Current phase |
N+4 | Bit | Insert step done |
N+5 | Bit | Run/hold |